Achtergrond

Driving development with the hand brake on

Paul van Gerven
Leestijd: 9 minuten

In 2006 ASML delivered its first two alpha tools. Yet chip manufacturers will probably only start using EUV in production in 2018 or 2019. Why is it taking so long? The two biggest stumbling blocks explained: the source and the vacuum.

Jos Benschop’s career at ASML coincides almost completely with the journey EUV lithography has made from scientific experiment to production-ready technology. Benschop joined the machinery manufacturer in 1997, the year in which EUV LLC was founded, and all his years of effort still haven’t been rewarded with mass-produced wafers.

Yet Benschop has never stopped believing in EUV. ‘I’ve never had the idea that we were doing the impossible. The work of EUV LLC convinced me that the physics presented no fundamental obstacles, and that hasn’t changed since.’

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