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Becoming a system supplier
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Over the last few years, the collaboration between ASML and Demcon has extended to developing machine components and modules. As a first step, the high-end technology supplier has developed the pre-aligner for a new wafer handler in the next generation of immersion lithography machines.
For nearly twenty years, Demcon has been supplying qualification tools to ASML to support both development and production activities. The majority of these tools are used to test wafer and reticle stages (or parts thereof), cable slabs and short-stroke and long-stroke actuators. The tools assess properties in the electrical, mechanical, dynamic, thermal and mechatronic domains, performing tests that range from simple connectivity probes to automated high-frequency dynamic disturbance measurements.
In recent years, the collaboration between Demcon and ASML has intensified – so much so that in 2011, Demcon even opened a branch in Eindhoven. Its evolution into a group of companies now employing some 275 people and covering a large range of competencies, including system assembly, both reflects and fuels its next ambition: becoming a system supplier that develops and manufactures modules for OEMs.
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